INLINE EXPRESS - 300MM
Small Footprint Vacuum Handling Platform for 200mm or 300mm wafers The InLine Express™ (IX) is a low cost handling platform for one or two parallel process modules. Each process module is isolated from atmosphere by a small load lock with an integrated transfer robot. These ExpressLocks™ mate to the field-proven FabExpress™ atmospheric front end.
The InLine Express is available in two levels of integration: fully wired, with or without system level software. The IX handles 200mm and 300mm round wafers. | The IX is available at two levels of integration: | | | Level 2.5 | Electrical Integration - Controls
Wiring and System Power | | Level 4 | Supervisory Controller
Supervisory System Software and GUI |
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