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AEROLOADER IV
The AeroLoader IV overhead hoist is an extension of the AeroTrak product set, utilizing the same flexible track concepts and intelligent routing capabilities. Since it is an overhead delivery system, the AeroLoader monorail is a "Zero Footprint" form of Intrabay automation. The AeroLoader is highly scalable and can meet the needs of both Interbay and Intrabay applications in a Unified System.
The AeroLoader delivers wafer carriers to "open" loadports on process equipment or other automation subsystems. Overhead hoists are the preferred solution for Intrabay transport for 300mm fabs.
The AeroLoader loads any SEMI E15.1 compliant process tool loadport equipped with a SEMI E84 communication interface. The AeroLoader integrates into the fab-wide material control software system, providing complete loadport-to-loadport material handling.
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