ALIGNMENT & CALIBRATION

Brooks offers innovative products and services for tool alignment and wafer handling needs for the semiconductor industry.  Brooks, through its Alignment Services offerings, helps fabs and OEMs to:

• Eliminate or reduce planned or unplanned tool down time
• Improve yields
• Accelerate tool deployment
• Create custom service kits for equipment
• Facilitate the transition from 200mm wafers to 300mm wafers

Call 719-471-9888 or email microtool@brooks.com for more information.

Alignment & Calibration Products

Alignment Tools

The 300mm environment places extreme demands on automation. With Brooks' Load Port Alignment Tools, Robot Alignment Tools, Electronic Levels and Dummy Wafers, equipment engineers can ensure that the equipment is precisely aligned. These tools give the assurance that setup is correct as well as the ability to effect predictive maintenance.

Interface Tools

Brooks offers a full line of adapters to allow 200mm wafers to be processed by 300mm equipment.Brooks also offers Openers allowing quick access to wafers in FOUP or SMIF.