FIXLOAD

Brooks' FIXLOAD™ is the industry's most widely accepted 300mm load port  for FOUPs (Front Opening Unified Pod)with already more than 16,000 units sold worldwide. In 1995, our company introduced the revolutionary Front Opening System to the market - today, Brooks is the leader in the 300mm load port market with the most clean and reliable BOLTS interface solutions.

And here is how it works:
The FIXLOAD, which is directly integrated into the process tool, receives a FOUP, docks it to the equipment and removes the FOUP door. Wafers may now be accessed by a handler to be transferred into the process tool without the risk of particle contamination.

Features

• Key Features
  • Most accurate and fastest wafer access (6 sec.)
  • BOLTS interface
  • Fully SEMI compliant + CE certified
  • Follows I300I guidelines
  • Choice of electronic solution (Basic I/O, CPU Control, Device Net)
  • E84 Parallel I/O
  • Parallel interlocking
  • Single connector interface communication for: E84, Carrier ID and FixMAP
  • Kinematic couplings for proper placement
• Optional Features
  • 13- or 25-wafer capacity
  • Integration of Carrier ID Reader/Writer (IR, RF, Barcode)
  • Safety frame
  • FEOL/BEOL lock out pin
  • Carriage

Benefits

• Highest cleanliness (CC 0.01 acc. to Fed. Stand. 209E)
• Field proven reliability
• Prepared for customized configurations
• Easy and seamless integration with process tool
• Small footprint
• Easiest maintenance access
• Ergonomic loading height

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