HERCULES EXPRESS SYSTEM

The Brooks Automation's Hercules Express (HX) Cluster Tool Platform is a Vacuum Transport System with a central robot designed for handling Flat Panel Substrates to multiple Process Modules in high vacuum environments.  This system employs a Brooks Automation MagnaTran™ 74 Robot housed in a multi-sided central vacuum chamber to transfer substrates among the various fac­ets of the chamber. The MagnaTran™ 74 robot can provide 3 axis transfer of flat panel substrates between the modules connected to the central chamber.  This configuration of the Hercules Express Cluster Tool Platform includes two Brooks VLL 70 Vacuum Load Locks coupled to the central vacuum chamber. The remaining facets of the central chamber are available for connection of the user's process modules.

HX platforms provide all the handling capabilities required to transfer flat panel substrates into the ultra clean, high vacuum environment within the cluster tool and to transport those substrates among the Process Modules attached to the central chamber.  The high-vacuum environment is maintained by the Transport System in conjunction with the Vacuum Load Locks and Process Modules connected to the chamber.  The Vacuum Load Locks are mechanically isolated from the central chamber by Transfer Isolation Valves (Slit Valves), which are kept closed except when a substrate is to be transferred through the slot.

The central chamber is supplied in 7-faceted version.  The Hercules Express Cluster Tool Platforms accommodate flat panel substrates from 600 x 720 mm to 750 x 950 mm.  End effector and Vacuum Load Lock changes may be required to accommodate substrate sizes within this range.  This configuration will accommodate a substrate size of 730 x 920 mm with a thickness of 0.7 mm.

The Hercules Express platform is controlled via. the user's Cluster Tool Controller (CTC) communicating with the Hercules Express platform's Transport Module Controller (TMC).  The TMC hardware and software interfaces with the Hercules Express platform's vacuum / vent system, MagnaTran™ 74 robot, Vacuum Load Locks and the user's Cluster Tool Controller, used to control the entire cluster tool, including the process modules.

Previous Page    Back to Tool Automation Products    Next Page