TOOL AUTOMATION PRODUCTS

Turn to Brooks for all your semiconductor tool automation needs—dry and wet atmospheric and vacuum wafer handling systems, modules and interfaces; load port modules; FOUP Tracking, and Alignment and Calibration Tools and Services. Brooks’ innovative tool automation solutions enable OEM equipment suppliers and end-user customers in the semiconductor and other complex manufacturing industries to achieve optimal manufacturing efficiency and increased productivity. At the same time, our solutions help OEMs and end-user customers achieve competitive differentiation through a balance of high performance and low total cost of ownership.