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Products
Tool Automation
Wafer Transport Systems - Vacuum
Wafer Transport Robots - Vacuum
Wafer Transport Systems - Atmospheric
Wafer Transport Robots - Atmospheric
Load Port Modules for FOUP
FOUP Tracking
Alignment & Calibration
Factory Automation
Critical Components
Custom Atmospheric Products
Legacy Products
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TOOL AUTOMATION PRODUCTS


Turn to Brooks for all your semiconductor tool automation needs—dry and wet atmospheric and vacuum wafer handling systems, modules and interfaces; load port modules; FOUP Tracking, and Alignment and Calibration Tools and Services. Brooks’ innovative tool automation solutions enable OEM equipment suppliers and end-user customers in the semiconductor and other complex manufacturing industries to achieve optimal manufacturing efficiency and increased productivity. At the same time, our solutions help OEMs and end-user customers achieve competitive differentiation through a balance of high performance and low total cost of ownership.