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MARATHON EXPRESS (MX) COMPONENTS: SAFETY & OPERATIONS
The purpose of this course is to teach the student how to safely operate the Marathon Express following the safety guidelines and procedures. Components operated in this course are as follows: Magnatran 7.1 robot, VCE6 loadlock, Topliner, Topcooler. Please note: This is an introductory course only and does not include troubleshooting and maintenance of these components.
Prerequisites
The trainee should be familiar with the operation of complex electromechanical equipment. No prior experience or knowledge of Brooks' components is required.
Audience
Primary: Cluster tool operators, maintenance technicians, technical support engineers, field service engineers, and application engineers. Secondary: Manufacturing managers and engineers.
Length
1 Day
Course Objectives
Upon completion of this course, the trainee should be able to perform the following:
- Identify and adhere to all safety guidelines and procedures when operating the Marathon Express
- Explain the basic theory of operation of the MX System
- Understand the basic operating principles of the Magnatran 7, VCE6 loadlock, Topliner, Topcooler
- Using the CDM, teach and verify the ability for the Mag 7 robot to pick and place from the VCE loadlock, topliner, and then to the PM
- Using the serial interface, send the appropriate commands to the Mag 7 robot, VCE, topliner to transfer a wafer into and out of the tool
- Setup and perform wafer mapping on one VCE load port
- Manually operate the slot valves and topcooler for wafer transfer
What To Bring To This Course
Brooks Training Department will provide all required materials, documents, and manuals.
  
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