  |  | | FAB EXPRESS (FX): SAFETY & OPERATOR
The purpose of this course is to give the trainee basic knowledge and experience operating all standard components comprising the Fab Express (FX) system. This course combines basic theory and hands-on practice in a state-of-the-art training laboratory. Components included in this course are as follows: Reliance 8 3-Axis robot, AcuLigner 8 aligner, FOUP and SMIF load port modules. Please note: This is an introductory course only and does not include troubleshooting and maintenance of these components. Please note: Course does not include TEC-3000 componetPrerequisites
The trainee should be familiar with the operation of complex electromechanical equipment. No Prior experience or knowledge of Brooks' atmospheric components is required. Audience
Cluster tool operators, maintenance technicians, technical support engineers, field service engineers, and application engineers. Length
1 Day Course Objectives
Upon completion of this course, the trainee should be able to perform the following: - Understand and apply safety-related issues in the operation of the Fab Express
- Explain the basic theory of operation of the FX System
- Understand the basic operating principles of the ATR8 3-AXIS robot and controller, Aculiner, FOUP and SMIF load port modules
- Using the CDM, teach and verify the ability for the ATR8 robot to pick and place from/to each station
- Using the serial / ethernet interface, send the appropriate commands to the ATR8 controller to pick / place wafers from each station
- Using the serial / ethernet interface, operate the Aculiner in conjunction with the ATR8 robot to center wafers on the robot end effector for reliable wafer delivery to the attached process module(s)
- Using the serial / ethernet interface, send the appropriate commands to the ATR8 controller to operate the loadports via DeviceNet
- Setup reflective wafer mapping on each load port using the CDM
- Perform wafer mapping using both the CDM and serial/ethernet interfaces
- Reference the User Manual to properly operate all standard components within the FX system
What To Bring To This Course
Brooks Training Department will provide all required materials, documents, and manuals.   
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