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MARATHON EXPRESS
The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer sized applications. The availability of 4, 6, 7, 8 sided versions coupled with its modular architecture allows the MX to be tailored to meet the varying needs of a wide range of process applications. Typical semiconductor applications include PVD, CVD, Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
Key Features
- Reconfigurable for 100 to 200mm size wafers with minimal hardware change.
- 10M+ MCBF MagnaTran Radius robots
- Field-proven VCE6 indexing vacuum load locks for 25 or 26 wafer cassettes with four factory interface options.
- Off-the-shelf vacuum configurations from 3 range to 8 range (torr) base pressure.
- Fifth generation power and communication systems
- Built-in hardware and safety interlocks
- Compliance with CE, S2, and all other relevant industry standards
Additional Product Information
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