VCE 6 LOAD LOCKS

Enable safe, clean AGV, RGV, or human operator transfer of up to 200mm, SEMI standard wafer cassettes. Brooks’ VCE 6 Vacuum Cassette Elevator load lock is available in four styles — Cassette Buffer Load Station with Cassette Transfer Arm, Ergonomic Tilt Platform and Cassette Guide, and Cassette Transfer Arm Platform — to provide cost effective, state-of-the-art factory interfacing that suits your wafer fabrication environment. The modular VCE 6 is designed for ultra-clean and reliable operation with full environmental isolation ranging from 10-6 scale high vacuum to just above atmospheric pressure

Key Features

• Automated, actuated door
• Isolated drive mechanism
• Chamber configured for a flush, clean room wall interface
• Integral, intelligent sensing capabilities including wafer position in cassette, wafer protruding out of cassette, and cassette on platform
• CE/S2 compliant

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