LOAD PORT MODULES FOR FOUP
As the world’s largest semiconductor automation supplier and the inventor of LPM technology, Brooks has shipped load port modules across the globe to every semiconductor fab. Brooks load port modules provide ultra-clean performance and superior load port to FOUP interoperability to meet the stringent requirements of today’s semiconductor manufacturers. Load Port Modules minimize cost and complexity by leveraging capabilities readily available in other portions of the process tool. Our units provide all the necessary status and control interfaces and hardware safety interlocks to help ensure safe, efficient, and ultra-clean loading and unloading of wafers to and from the process tool. Products
  
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