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RAZOR™ TRAVERSER
Leverage high-speed horizontal motion to give your Razor robot access to multiple process tool, load ports and cassette staging locations within your fab. Brooks’ Razor Traverser takes advantage of the company’s patented direct drive technology to deliver superior reliability and smooth motion control for the lowest possible vibration and particle contamination. At the same time, it operates at high speeds designed to keep pace with the other high-performance Razor modules. Like all Razor products, the Traverser takes advantage of the Fusion Controls™ automation control solution to enable easy configuration for meeting a wide variety of tool application requirements.
Key Features
- High reliability for up to 10M MCBF performance
- Fifth generation direct drive technology
- Patented motion control algorithms for reduced vibration
- Pre-packaged templates for fast tool configuration
- Compliance with SEMI and other industry standards
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