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RAZOR™ ALIGNER


Achieve high-precision wafer positioning with the Brooks’ cutting-edge high-performance atmospheric Razor Aligner. Capable of handling 300mm wafers, the Razor Aligner provides superior throughput, repeatability, and cleanliness to meet the stringent requirements of today’s advanced semiconductor manufacturers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time. Like all Razor products, the Aligner takes advantage of the Fusion Controls™ automation control solution to enable easy configuration for meeting a wide variety of tool application requirements.

Key Features

  • High reliability for up to 10M MCBF performance
  • Passive Edge Contact—not grip—for maximum cleanliness and wafer protection
  • Patented motion control algorithms for reduced vibration
  • Pre-packaged templates for fast tool configuration
  • Compliance with SEMI and other industry standards
  • Buffer shelf for higher throughput

 

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