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JET™ ATMOSPHERIC TRANSPORT SYSTEM


 

Take off with a revolutionary approach to semiconductor wafer handling. Jet™ , the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. Brooks’ Jet family delivers the high-performance ultra-cleanliness and proven reliability that today’s semiconductor manufacturers expect and demand.

Key Features

  • Crate-to-Operate™ in less than one hour for fast, easy set-up and integration
  • Kinematic mounting system with one-time height and level adjustment
  • Brooks’ patented direct drive technology and motion control expertise
  • End-of-line configurable options
  • Uniform set of spare for easy part swapping across multiple tools
  • Availability in 2-, 3- and 4-wide configurations

 

Additional Products Information

JET™ Brochure
JET™ Datasheet

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