WAFER TRANSPORT ROBOTS - ATMOSPHERIC
 Brooks Automation’s family of atmospheric robots and modules are an integral part of high performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. A technology and performance leader in atmospheric robotics, Brooks offers cutting-edge robotics solutions that enable new levels of tool precision while accelerating installation and set-up for each tool shipment. Leveraging multiple generations of industry-leading automation standards, Brooks’ atmospheric robots and modules provide the optimized mix of throughput, repeatability, and cleanliness required for today’s advanced manufacturing processes. Products
  
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