WAFER TRANSPORT SYSTEMS - ATMOSPHERIC
Brooks is a technology and performance leader in atmospheric systems designed for factory automation in semiconductor wafer processing and other complex manufacturing environments. Supplying more than 70% of the market’s atmospheric transport system content, Brooks consistently delivers the high performance, ultra-cleanliness and proven reliability required for today’s advanced manufacturing processes. Our EFEMs are thoroughly tested under the most rigorous fab conditions to ensure industry-leading interoperability with manufacturers’ equipment and processes. In addition, our atmospheric systems feature high configurability and a wide selection of off-the-shelf options, making them readily adaptable to meet application-specific needs and keep pace with rapidly evolving industry requirements. Products
  
|