WAFER TRANSPORT ROBOTS - VACUUM

Brooks is a global leader in the production of vacuum handling robots and modules for semiconductor wafer processing, flat panel display manufacturing, and other complex manufacturing environments. We earned our technology and market leadership position by amassing unparalleled intellectual property that differentiates our best-in class products and provides significant throughput, reliability, and serviceability advantages. Brooks’ field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency and accelerate profits for today’s manufacturers.

Products

MagnaTran® Product Family

Our most advanced and reliable robot for operation in vacuum and isolation environments.

VCE 6 Load Locks

The VCE 6 Vacuum Cassette Elevator load lock provides cost effective, state-of-the-art factory interfacing for up to 200mm size, SEMI standard wafer cassettes.

InLigner™

The InLigner provides wafer centering and edge fiducial orientation for 100 to 200 mm semi standard and Jeida standard wafers.