WAFER TRANSPORT SYSTEMS - VACUUM
Brooks has earned a leadership position in vacuum transport systems by amassing unparalleled intellectual property that differentiates of our best-in-class products. Our advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing, and other complex manufacturing environments. We offer a range of systems—available in numerous configurations—100mm to 300mm wafer transport that meets specific manufacturing environment and process requirements. Products
  
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