Tool Automation Products
| InLine Express - 300mm |
| The InLine Express™ (IX) is a low cost vacuum handling platform for one or two parallel process modules. |
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| Gemini Express 5000 - 300mm |
| The Gemini Express™ 5000 (GX5000) is a 200/300mm bridge handling system with capability for two load locks and three process facets. |
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| Gemini Express 6000 - 300mm |
| The Gemini Express™ 6000 (GX6000) is a 200/300mm bridge handling system with capability for two load locks and four process facets. |
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| Gemini Express 7000 - 300mm |
| The Gemini Express™ 7000 (GX7000) is a 200/300mm bridge handling system with capability for two load locks and five process facets. |
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| Gemini Express 8000 - 300mm |
| The Gemini Express™ 8000 (GX8000) is a 200/300mm bridge handling system with capability for two load locks and six process facets. |
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| Hercules Express System |
| The Brooks Automation's Hercules Express (HX) Cluster Tool Platform is a Vacuum Transport System with a central robot designed for handling Flat Panel Substrates to multiple Process Modules in high vacuum environments. |
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| MagnaTran 70/74 for FPD |
| The MagnaTran 70 vacuum handling robot represents state-of-the-art vacuum technology in large display substrate handling in vacuum. |
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| FabExpress Systems (FX) |
| The FabExpress™ (FX) atmospheric system is a bridge system designed to simultaneously handle 200mm and 300mm wafers. |
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| FIXLOAD |
| FIXLOAD™ is the industry's most widely accepted 300mm load port module for FOUP Handling with the most clean and reliable BOLTS interface solution. |
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| Reliance ATR™ |
| The Reliance ATR™ robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications. |
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| AcuLigner™ |
| The AcuLigner™ 8 is an integral part of Brooks Automation's high performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends. |
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| AcuTrav |
| The AcuTrav provides high speed horizontal motion giving robots greater access. |
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| DBM Atmospheric Robots |
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| AxM™ Atmospheric Mount Robots |
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| VAC-407™ |
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| OneFab AMHS |
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| AeroLoader IV |
| The AeroLoader IV overhead hoist monorail delivers wafer carriers to "open" loadports on process equipment or other automation subsystems. |
Polycold® Systems Cryogenic Refrigeration
| AquaTrap® |
| The AquaTrap® solutions provide a highly economical way to remove extra water vapor from your vacuum chamber. |
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| P Cryocooler |
| Polycold® Portable Cryocoolers provide compact, portable, easy-to-use alternatives to liquid nitrogen in small vacuum systems. |
Precision Air Flow Controls
| VRV-2000 |
| The VRV-2000 Vacuum Regulation Valve is designed with electronic butterfly valves to maintain a constant pre-set pressure differential between a wet bench and the clean room. |
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| VRV-Parametric |
| The VRV-Parametric has all of the same features as traditional values but at lower cost and increased chemical resistance. |