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LEGACY PRODUCTS


Brooks' Legacy Products are available to existing customers only.

 

Tool Automation Products

InLine Express - 300mm
The InLine Express™ (IX) is a low cost vacuum handling platform for one or two parallel process modules.
Gemini Express 5000 - 300mm
The Gemini Express™ 5000 (GX5000) is a 200/300mm bridge handling system with capability for two load locks and three process facets.
Gemini Express 6000 - 300mm
The Gemini Express™ 6000 (GX6000) is a 200/300mm bridge handling system with capability for two load locks and four process facets.
Gemini Express 7000 - 300mm
The Gemini Express™ 7000 (GX7000) is a 200/300mm bridge handling system with capability for two load locks and five process facets.
Gemini Express 8000 - 300mm
The Gemini Express™ 8000 (GX8000) is a 200/300mm bridge handling system with capability for two load locks and six process facets.
Hercules Express System
The Brooks Automation's Hercules Express (HX) Cluster Tool Platform is a Vacuum Transport System with a central robot designed for handling Flat Panel Substrates to multiple Process Modules in high vacuum environments.
MagnaTran 70/74 for FPD
The MagnaTran 70 vacuum handling robot represents state-of-the-art vacuum technology in large display substrate handling in vacuum.
FabExpress Systems (FX)
The FabExpress™ (FX) atmospheric system is a bridge system designed to simultaneously handle 200mm and 300mm wafers.
FIXLOAD
FIXLOAD™ is the industry's most widely accepted 300mm load port module for FOUP Handling with the most clean and reliable BOLTS interface solution.
Reliance ATR™
The Reliance ATR™ robot provides the lowest cost of ownership and highest productivity for semiconductor material handling applications.
AcuLigner™
The AcuLigner™ 8 is an integral part of Brooks Automation's high performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends.
AcuTrav
The AcuTrav provides high speed horizontal motion giving robots greater access.
DBM Atmospheric Robots
AxM™ Atmospheric Mount Robots
VAC-407™
OneFab AMHS
AeroLoader IV
The AeroLoader IV overhead hoist monorail delivers wafer carriers to "open" loadports on process equipment or other automation subsystems.