  |  | | MARATHON 2 TRANSPORT SYSTEMS
Achieve new levels of performance and profitability with the Marathon 2 family of integrated, modular vacuum transport systems (VTS) from Brooks, the initiator of the vacuum cluster tool. Marathon 2 systems, which are designed specifically for 300mm wafer manufacturing, combine the proven reliability of the MagnaTran robot with the latest innovations in cluster tool technology to optimize reliability and performance for OEMs, while delivering low cost of ownership for end users.Key Features
- 10M+ MCBF MagnaTran Radius robots
- Speed Lock™ high-throughput stacked load locks
- Center Smart™ automatic wafer centering
- Fifth generation power and communication systems
- Built-in hardware and safety interlocks
- Insight™ clear transport lid for visual wafer monitoring
- Compliance with CE, S2, and all other relevant industry standards
Additional Product Information
Back to Products Next Page   
| |