ID STATIONS

Brooks ID stations are designed for the special requirements of semiconductor fabs. They provide the ability to identify RFID tags that come along with carriers and forward data or convert them to other formats. Brooks ID stations are available for the most common types of carriers used in semiconductor processes.

ID Station Products

Registry Station for FOUPs

The SAF-01 includes an integrated RFID reader as well as a barcode scanner.

Registry Station for Reticles

SAR-01 is designed to identify barcode data and match them to the RFID tag and database.

ID Station KCP

The KCP ID station is used on tools that have no load port or are in the form of a small working unit.

RFID Station WIP Rack

The WIP rack reader will fit in existing racks and will identify the most common carriers in 200 mm and 300 mm fabs.

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