|  |  | PFC WATER VAPOR CRYOPUMP The PFC Water Vapor Cryopump effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition. When added to your vacuum system, the PFC Cryopump can reduce pumpdown times by 25% to 75% and can increase product throughout by 20% to 100%. In addition, the PFC Cryopump offers a superior cost/performance ratio compared to liquid nitrogen cooled Meissners — typically delivering return on investment in as little as one year.
Key Features: - Simple, tube-type cold element (cryocoil or Meissner coil)
- Cryocondensation of water vapor in vacuum systems at speeds up to 200,00 L/sec, vacuum levels to 1.5 x 10-9 Torr (2 x 10-9 mbar) depending on model and application
- Heat removal to 3600 watts
- Very fast pumping speeds
- Globally compliant, non-toxic and non-flammable green refrigerant charge
- Patented cryogenic refrigeration process and refrigerant mixtures
Product Documentation
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