ON-BOARD^® IS CRYOPUMP SYSTEMS

Intelligent Cryopump Systems

The new world standard in cryogenic vacuum technology, On-Board IS cryopump systems leverage Brooks' new high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency.

• Patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance, delivering exceptional process consistency
• Quickest regenerations in single and multipump configurations
• Lowest consumption of energy and cooling water of any CTI-Cryogenics cryopump system — with no compromise in vacuum performance
• Easiest system integration and fastest production installation
• Enhanced GOLDLink® capability enables enhanced remote monitoring for both preventive and predictive maintenance
• Highest uptime, highest productivity, and lowest overall cost-of-ownership of any cryopump system
• Backed by legendary Helix service and support, worldwide

Documentation

On-Board IS 250F and On-Board IS 320F Datasheet

On-Board IS 250F and On-Board IS 320F Cryopumps For Ion Implant Applications.

On-Board IS 250FE and On-Board IS 320FE Datasheet

On-Board IS 250FE and On-Board IS 320FE Cryopumps For Ion Implant Applications - High Hydrogen Pumping Speed

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