SMIF PRODUCTS

Leverage I/O devices that provide a Standard Mechanical Interface (SMIF) interface to fab automation tools with minimal risk of contamination. Brooks’ ultra-clean SMIF solutions deliver Class 0.1 performance at wafer level in a Class-1000 environment for high reliability and short recovery time. Our SEMI- and CE-compliant SMIF products offer the high interoperability, world-class performance, and low cost of ownership that today’s manufacturers demand.

SMIF Products

ERGOSPEED II

ERGOSPEED II™ is the Brooks Automation's ultra-clean, highly reliable 200mm SMIF load port solution for adaptive tool interface applications.

SLR 200 M Series

The SLR 200 M series of robots allows for manual loading and unloading of 8” standard SMIF pods containing wafer or reticle cassettes.