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SLR 200 M SERIES


 

Be prepared to manually open a SMIF pod — quickly and easily — for accessing wafers or reitcles. Brooks’ SLR 200 M Series robots allow for manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette.

Key Features

  • Availability in both front-side and rear-side cassette opening configurations
  • Finger guard and safety brackets for preventing operator injury

 

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