SLR 200 M SERIES

Be prepared to manually open a SMIF pod — quickly and easily — for accessing wafers or reitcles. Brooks’ SLR 200 M Series robots allow for manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette.

Key Features

• Availability in both front-side and rear-side cassette opening configurations
• Finger guard and safety brackets for preventing operator injury

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