ERGOSPEED II

ERGOSPEED II™ is a highly reliable, ultra-clean 200mm SMIF load port solution for adaptive tool interface applications. Featuring Brooks’ superior laminar airflow design, ERGOSPEED II ensures maximum cleanliness within the cassette and wafer area to prevent contamination. The solution’s proven design — enhanced by extensive reliability testing, and continuous improvements — delivers exceptional fab performance. It’s no wonder that several thousand EROSPEED II units have been installed in fabs across the globe.

Key Features

• Pod platform presentation at the ergonomic loading height of 90-0mm
• Availability of transfer arm in various configurations

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