PGCL CLOSED-LOOP GAS CHILLER

The PGCL Closed-Loop Gas Chillers, which incorporate both a closed-loop refrigerating system and a re-circulating gas coolant system, are capable of cooling a gas stream to temperatures below -100°C using highly efficient refrigerant heat exchangers. The chilled gas stream is re-circulating using any inert dry gas — including nitrogen, helium, argon, or air — as the coolant medium. The PGCL provides substrate cooling in a broad range of applications, such as cooling of wafer chucks in semiconductor process tools, thermal testing of electronics, and other situations where gas cooling offers specific advantages.

Key Features:

• Chilled gas recirculation offers easy serviceability and inherently reliable operation.
• Field-proven modules deliver unparalleled reliability in a small footprint.
• Clean coolant gas has low cost of ownership and allows high temperature bake out without pressure buildup
• Shipped ready to operate for easy installation and maintenance
• Uses US EPA-SNAP approved refrigerant gases
• Complies with CE, F47 & SEMI S2 standards

Product Documentation

Polycold PGCLClosed Loop Gas Chillers Datasheet

Polycold® Closed Loop Gas Chillers incorporate both a closed loop refrigerating system and a recirculating gas coolant system, which cools a gas stream using highly efficient refrigerant heat exchangers.

Refrigerant Replacement Charges

Polycold Material Safety Data

Previous Page    Back to Polycold Products    Next Page