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CARBON FIBER WAFERS


 

 Set up and cycle test your 300mm and smaller diameter equipment without breaking silicon. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications.

Brooks' Alignment Services increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration.

 

300mm product

200mm product

150mm product

125mm product

 

CF-300

CF-200

CF-150

CF-125

Data Sheet

 CF-Series Datasheet (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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