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200MM ALIGNMENT


 

200mm Robot Alignment Tool

Stop “eyeball” alignments! Brooks' ALIGN™ series of alignment tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment. Versatile software in the RC-2005 aligns a range of wafer handlers. Save your wafers and save your time!

Brooks Robotic Alignment Tool uses optical non-contact measurement sensors to analyze robotic motion. The motion of the wafer is characterized by five different degrees of freedom: X, Y, Z, RX, and RY. Using on-screen instructions and “real time” graphical displays, the technician can make accurate adjustments to the machine setup. Numerical readouts provide statistical analysis, while Pass/Warn/Fail labels allow for fast, simple inspection of robots.

 

General Purpose Tool

AMAT Centura-Endra Tool

Data  Sheet

RC-2005 (PDF)

RC-2004 (PDF)

User Manual

RC-2005 (PDF)

RC-2004 (PDF)

Quick Start Guide 

RC-2004 (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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