300MM ALIGNMENT
300mm Robot Alignment Tool Stop “eyeball” alignments! Brooks' ALIGN™ series of alignment tools provide a fast, repeatable and highly accurate method of aligning your wafer handling equipment — from wafer sorters and inspection tools to cluster tools and equipment front ends. Increase your yield and throughput through more accurate alignments while saving up to 75% of the time required by “eyeball” alignments.
The RC-3003 Robotic Alignment Tool uses optical non-contact measurement sensors to analyze robotic motion. The motion of the wafer is characterized in slots 1-5 and 21-25 in five axes: X, Y, Z, RX, and RY. Using on-screen instructions and “real time” graphical displays, the technician can make accurate adjustments to the machine setup. Numerical readouts provide statistical analysis, while Pass/Warn/Fail labels allow for fast, simple inspection of robots. Call 719-471-9888 or email microtool@brooks.com for more information. Back to Robot Alignment Next Page   
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