ZARIS - RETICLE AUTOMATION SYSTEM

The ZARIS reticle automation system from Brooks reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes. This industry-leading reticle sorter/bright light macro inspection/nitrogen cleaning system prevents the mask damage and mishandling typically encountered in manual inspection processes. By consistently presenting defect-free reticles in the proper orientation, ZARIS improves stepper utilization and reduces lithography rework. With a proven record for reliable operation and ease of use, ZARIS accelerates factory ramp while minimizing reticle and pellicle damage. ZARIS complements Brooks’ suite of lithography automation systems including the industry-leading Guardian Reticle Stocker.

Key Features

• Reticle sorting, bright light inspection, and nitrogen cleaning
• Identification of reticles and pellicles
• Use of ESD-safe materials
  • Optional features, including:
  • optical character recognition for reticle and/or pellicle ID
  • microscope inspection
  • automated particle detection
  • pellicle mounting
  • GEM/SECS link

Additional Product Information

Zaris Datasheet

Particle Detection System Datasheet

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