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GUARDIAN BARE RETICLE STOCKER


 

Brooks’ next-generation Guardian Bare Reticle Stocker is a fully automated, high-density storage system for 5" and 6" reticles. Featuring a unique design with a reticle "vault", the Guardian completely isolates reticles from the surrounding environment. This isolation is achieved using a patented "Circular Air System" which supplies continuous ISO Class 2 ultra-clean air to the reticle vault. With no moving mechanisms inside the vault, the Guardian is the only reticle stocker that completely eliminates any service-related entry into the reticle storage area. In addition, ionizers and static dissipative materials protect reticles from ESD-induced damage. As proven through extensive testing, the Guardian provides the highest degree of reticle protection available in the market today.

Key Features

  • Advanced AMC contamination and ESD protection
  • Smaller system footprint with higher storage densities
  • Reduced Cost of Ownership
  • Shorter stocker cycle times
  • Support of multiple reticle types
  • Improved reliability & serviceability
  • Automated delivery capable

 

Additional Product Information

Guardian Datasheet
Particle Detection System Datasheet

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