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200MM RETICLE CASSETTE CARRIER


 

Handles multiple reticles in a 200 mm cassette form factor.  This allows reticle handling to be done with standard semiconductor automation components including 200 mm SMIF robots.Reticle cassette

Data Sheet

CA-2000 (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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