Brooks Automation Logo
Sign In Careers Contact Us Stay Informed Quicklinks
Products
Products
Tool Automation
Factory Automation
Load Port Modules for FOUP
RFID Products
Alignment & Calibration
SMIF Products
Lithography Automation
AMHS
CTI-Cryogenics® Products
Granville-Phillips® Vacuum Instrumentation
Polycold® Systems Products
PTI Air Flow Controls
Critical Solutions
Custom Atmospheric Products
Brooks Life Science Systems
Legacy Products
Product List
Environmental Health & Safety
Hazardous Material Disclosure
Literature
Information Request

200MM RETICLE CASSETTE CARRIER


 

Handles multiple reticles in a 200 mm cassette form factor.  This allows reticle handling to be done with standard semiconductor automation components including 200 mm SMIF robots.Reticle cassette

Data Sheet

CA-2000 (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

Previous Page    Back to Misc - Other FOUP and cassette interfaces