LITHOGRAPHY AUTOMATION

Brooks’ Lithography Automation solutions protect reticles — the most valuable component of the wafer fabrication process — against loss, damage, or contamination. Enhancing the efficiency of a fab’s reticle logistics, our industry-leading reticle stockers and macro inspection tools safeguard against costly disruption in the Litho bay. At the same time, they significantly reduce stepper idle time and keep customer shipments on track. Brooks’ Lithography Automation solutions can work together to provide a complete Automated Reticle Delivery System (ARDS) or can be operated as a standalone products in smaller production environments.

Lithography Products

Guardian Bare Reticle Stocker

Increasingly advanced reticles require the highest degree of protection as lost, damaged, or contaminated reticles can cause major disruptions in the lithography area. This leads to long stepper idle time and missed customer shipments. The Guardian introduces an innovative concept to reticle automation: the reticle "vault".

ZARIS - Reticle Automation System

ZARIS has become the industry's leading reticle macro inspection tool and complements Brooks suite of lithography automation systems.