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200MM CASSETTES ON 300MM LOAD PORTS


Brooks' AM-3006 wafer adapter allows 200mm wafers to be handled on a 300mm load port! Simply place the unit on the kinematic pins and place a 200mm open cassette on the adapter. Remove the adapter at any time to return to 300mm capability.

The AM-3006 was introduced in spring of 2005.  It incorporates many improvements over the older AM-3002.  Brooks Automation will continue to offer the AM-3002 to the large customer base that has integrated or qualified the AM-3002.

 

Newest Product

Legacy Product

Data  Sheets

AM-3006 (PDF)

AM-3002 (PDF)

Enhancments

AM-3006 vs AM-3002 (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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