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200MM WAFERS IN 300MM FOUP


Brooks' AM-3005 wafer adapter allows 200mm wafers to be processed inside a 300mm FOUP saving you time and money! Simply slide the unit in and start processing 200mm wafers. Remove the adapter at any time to return to 300mm capability.   

AM-3005 200mm wafers in FOUP

The AM-3005 was introduced in spring of 2005.  It incorporates many improvements over the older AM-3000.  Brooks Automation will continue to offer the AM-3000 to the large customer base that has integrated or qualified the AM-3000.

 

Newest Product

Legacy Product

Data Sheets

AM-3005 (PDF)

AM-3000/AM-3001 (PDF)

Enhancements

AM-3005 vs AM-3000 (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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