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WAFER LEVELS


Matching the weight of a silicon wafer, this versatile tool's design allows use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.

300mm product

200mm product

150mm product

 

EL-3003

EL-2003

EL-1503

Data Sheet

EL-Series Data Sheet  (PDF)

User Manual

EL-Series User Manual (PDF)

Call 719-471-9888 or email microtool@brooks.com for more information.

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