INTERFACE TOOLS

Call 719-471-9888 or email microtool@brooks.com for more information.

Adapters -300mm bridge tools

200mm wafers in 300mm FOUP

Brooks’ AM-3005 wafer adapter allows 200mm wafers to be processed inside a 300mm FOUP.

200mm Cassettes on 300mm load ports

Brooks' AM-3006 wafer adapter allows 200mm cassettes to be placed on 300mm load ports.

200mm Cassette in 300mm FOUP

Brooks' AM-3004 cassette adapter allows 200mm wafer processing from a cassette placed in a 300mm FOUP.

11mm lift adapter for 300mm cassettes

Brooks' AM-3003 adapter allows immediate processing of wafer in 300mm cassettes on equipment setup for FOUPS. No need to reteach equipment to account for the 11mm difference!

Openers - access wafers in FOUP or SMIF quickly

300mm FOUP and FOSB opener

Brooks' MPO-3002 is an ergonomically designed manual 300 mm door opener for 25 and 13 capacity FOUPs and FOSBs.

200mm SMIF POD opener

Brooks' MPO-2000 is an ergonomically designed manual door opener for 200mm SMIF PODs.

150mm SMIF POD opener

Brooks' MPO-1500 is an ergonomically designed manual door opener for 150mm SMIF reticle PODs.

Misc - Other FOUP and cassette interfaces

300mm kinematic pins

Brooks' Kinematic Coupling Pins are manufactured to strict SEMI standards and packaged in sets of three. Pins are available in either threaded (KP-3000) or press-fit (KP-3001) configurations.

200mm standard platform

Brooks' SP-2000 standard cassette interface platform attaches to your 200mm equiment for easy and correct registation with end user cassettes.

200mm reticle cassette carrier

Brooks' CA-2000 allows 150mm or 125mm reticle handling to be done with standard semiconductor automation components including 200 mm SMIF robots.

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