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AEROTRAK 200/300
The AeroTrak transport system is an overhead monorail system. It is the most flexible wafer transport system available today. AeroTrak provides safe, reliable, and clean (below Class 1) automated transport for semiconductor WIP carriers and lithography reticles. The AeroTrak transport system consists of self-powered intelligent vehicles that traverse a monorail track under the direction of a central routing computer. The system may be designed to fit any fab layout while keeping wafers and reticles up and away from the activity on the fab floor.
AeroTrak forms a flexible transport network through the use of routing modules that allow track intersections, horizontal transfers, parking lots, and elevation changes to be placed throughout the fab. The AeroTrak routing modules enable the construction of short-cuts and alternate transport paths between stockers. Guided by the AeroTrak controller using patented routing algorithms which optimizes vehicle travel to deliver payloads to their destination.
The AeroLoader is an extension of the AeroTrak product set...
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