Brooks Automation Logo
Sign In Careers Contact Us Stay Informed Quicklinks
Products
Tool Automation
Factory Automation
CTI-Cryogenics® Products
Granville-Phillips® Vacuum Instrumentation
Polycold® Systems Products
PTI Air Flow Controls
Critical Solutions
CTI-Cryogenics® Cryopump Systems
Granville-Phillips® Vacuum Instrumentation
Polycold® Systems Cryogenic Refrigeration
Technology
Promotions
Documentation
Product Reps
Precision Air Flow Controls
Custom Atmospheric Products
Brooks Life Science Systems
Legacy Products
Product List
Environmental Health & Safety
Hazardous Material Disclosure
Literature
Information Request

TECHNOLOGY


Brooks uses the most advanced technology possible in our products, assuring you the most accurate, reliable, and easiest to use vacuum technology available. To help you learn more about our products and what makes them unique, we've created interactive "tours" of key products.

Macromedia Flash Player   Macromedia Flash Player is required for the tours!

Vacuum Gauge Product Tour
Explore the technology behind our Stabil-Ion™, Micro-Ion, and Convectron Gauges — with comparative overviews and principles of operation.
Take the Tour!
Cryopump Product Tour
The technology behind our industry leading high vacuum pumps.
Take the Tour!
Cryopump Regeneration
Tutorial demonstrating the regeneration of a cryopump.
Take the Tour!

Technology Articles
Below you will find informative articles on cryogenic pumping technology.

Cryogenic High Vacuum Pumps
High vacuum processing has wide application in the manufacture of semiconductor devices, computer hard disk systems, thin films for optical and electronic equipment, and basic research.

Cryogenic Adsorption of Noncondensibles in the High-Vacuum Regime
Cryogenic vacuum pumps must use cryogenic adsorption means to remove helium, hydrogen, and neon from vacuum systems in order to achieve high vacuum.