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 We offer the most complete set of Automated Material Handling Systems (AMHS) for transporting, storing, and managing semiconductor wafer carriers and reticles. The Automated Material Handling Systems ensure that the right wafer and reticle are in the right place at the right time.
Automated Material Handling provides numerous benefits to semiconductor manufacturers: - Keeps track of thousands of valuable work-in-process wafer carriers. During the production cycle, wafers must traverse a complex, back-and-forth route of up to 10 miles through the fab
- Helps increase utilization of expensive process tools by ensuring that wafers are delivered to tools when they're needed
- Conserves valuable fab floor space by providing high-density automated storage/retrieval and "zero footprint" overhead transport
The semiconductor industry is currently in the midst of a transition to 300mm wafer manufacturing. 300mm fabs will cost upwards of $2 billion to build, so increasing tool utilization and improving overall factory effectiveness are more important than ever. Intrabay automation is a critical component in helping manufacturers improve their productivity. The larger wafer size means that wafer carriers may weigh up to 22 lbs. (10kg) - too heavy for fab operators to transport manually.
The Automated Material Handling products are the industry's most flexible solution for storing, transporting and controlling wafer carriers between process areas of the fab (Interbay) as well as between process and metrology tools and stockers (Intrabay).
We provide both a Unified Material Handling System solution as well as the traditional segregated system solutions for Interbay, Intrabay, and Lithography automation. All of the material handling systems are controlled by a proven and reliable TransNet Material and Control Software (MCS). AMHS Products
  
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