ALIGNMENT TOOLS

Call 719-471-9888 or email microtool@brooks.com for more information.

The 300mm environment places extreme demands on automation. With Brooks' alignment tools, equipment engineers can ensure that the equipment is precisely aligned.  These tools give the assurance that setup is correct as well as the ability to effect predictive maintenance.

Robot Alignment

300mm Alignment

Brooks' RC-3003 Robot alignment tool functions as both an inspection as well as alignment jig to keep your 300mm wafer handling robots aligned.

200mm Alignment

Brooks' RC-2004 and RC-2005 200mm Robot Alignment Tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment.

Electronic Levels

Wafer Levels

Brooks' EL-Series electronic wafers are degined to match the weight and diameter of SEMI standard wafers. These tools are available in 150mm,200mm and 300mm diameters.

Dummy Wafers

Carbon Fiber Wafers

Use Brooks' CF-Series carbon fiber dummy wafers to setup and burn-in equipment without the risk ob breaking silicon wafers.

Glass Target Wafers

Use Brooks' TW-Series glass target wafers to setup equipment when you need the ability to "see through" the wafer for proper alignment.

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