  |  | | GEMINI EXPRESS (GX) COMPONENTS: SAFETY & OPERATIONS
The purpose of this course is to teach the student how to safely operate the Gemini Express following the safety guidelines and procedures. Components operated in this course are as follows: Magnatran 7.1 robot, Acutran 7 Robot, Aculiner 7 aligner, FOUP and load port modules. Please note: This is an introductory course only and does not include troubleshooting and maintenance of these components.
Prerequisites
The trainee should be familiar with the operation of complex electromechanical equipment. No prior experience or knowledge of Brooks' components is required.
Audience
Primary: Cluster tool operators, maintenance technicians, technical support engineers, field service engineers, and application engineers. Secondary: Manufacturing managers and engineers.
Length
1 Day
Course Objectives
Upon completion of this course, the trainee should be able to perform the following:- Understand and apply safety-related issues in the operation of the Gemini Express
- Explain the basic theory of operation of the GX System
- Understand the basic operating principles of the Magnatran 7, Acutran 7, Aculiner, and FOUP load port modules
- Using the CDM, teach and verify the ability for the Mag 7 robot to pick and place from one loadlock and one PM
- Using the CDM, teach and verify the ability for the Acutran 7 robot to pick and place from one loadlock, one LPM, and the Aculiner
- Using the serial interface, send the appropriate commands to the Mag 7 / ATR 7 robot to transfer a wafer into and out of the tool.
- Setup reflective wafer mapping on one load port using the CDM
- Perform wafer mapping using both the CDM and serial/ethernet interfaces
- Manually operate the slot valves for wafer transfer
What To Bring To This Course
Brooks Training Department will provide all required materials, documents, and manuals.   
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