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Solutions
Overview
RFID
Cryogenic Pumps
Vacuum Measurement Solutions
Cryogenic Refrigeration Systems
Alignment & Calibration
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SOLUTIONS


Brooks Automation provides solutions for complex manufacturing systems and environments. We create manufacturing efficiency through a wide range of products and solutions, specifically addressing different components of the manufacturing process.

RFID - Brooks RFID Division concentrates its business activities on the development, production and integration of RFID system solutions.

Cryogenic Pumps - CTI-Cryogenics, a division of Brooks Automation, is the global leader in cryogenic high-vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity.

Vacuum Measurement Solutions - Granville-Phillips vacuum measurement solutions are the industry's standard for both reliability and performance.

Cryogenic Refrigeration Systems - Polycold Systems offers a complete line of closed-loop cryogenic refrigeration systems for vacuum deposition, process heat transfer, and other applications.

Alignment & Calibration - Brooks Alignment Services Division offers innovative products and services for tool alignment and wafer handling needs. As the leader in alignment systems for the semiconductor industry, we help Fabs and OEMs.