  |  | | VRV 2000
 Instant Control
The VRV-2000 Vacuum Regulation Valve is designed to maintain a constant pre-set pressure differential between a wet bench and the clean room, replacing outmoded manual damper and electronic butterfly valves. Mechanical forces provide the required balance and act directly on the control mechanism which respond instantaneously to changes in house exhaust pressure.
Improve Operator Safety
Improperly exhausted wet benches may allow fumes to escape into the clean room, putting personnel at risk. Therefore, airflow past an operator must be sufficient to draw fumes away but must not create turbulence. By maintaining constant process pressure, the VRV-2000 maintains a constant velocity of air through any opening, ensuring operator safety (even with widely fluctuating house exhaust). Improve Product Quality
Traditional damper and butterfly valves are typically adjusted for a worst-case safety scenario: 30% higher than the required flow rate with the doors open and house exhaust at a minimum. This can compromise product within the wet bench with the detrimental effects of crosscontamination and airborne droplets deposited on the product surfaces. With instant compensation, the VRV-2000 allows flow rates to be capped at the minimum required for safety, reducing air low and inhibiting evaporation and condensation of contaminated vapor on the product. By controlling the pressure at point-of-use, the VRV-2000 prevents cross-talk from one wet bench to another, and assures repeatability from wafer to wafer and from batch to batch. Air-flow Management Reduces Waste and Costs
Over 21% of all clean room air exhausts through a wet bench. The VRV-2000 compensates for house exhaust fluctuations, allowing a much lower set point and providing up to a 10% reduction in exhaust air. A reduction in the overall volume of air lowers the costs associated with decontaminating the air, from clean room entry, through wet bench processes to the exit stacks. The results are measurable and substantial savings in clean air production, effluent removal and air handling. Features - PVC or stainless steel construction for process compatibility
- Bypass throttle to ensure minimum air flow level
- Only one moving component for fail-safe operation
Benefits - Safer operating environment
- Improved product quality
- Reduced clean room air usage
- Drastically reduced exhaust handling costs
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