Energy Saving Controllers - Brooks Automation, Inc.

ENERGY SAVING CONTROLLERS

Energy Saving Solutions
Many processes now call for rapid point-of-use exhaust control to minimize process variation caused by house exhaust changes. By reducing one more variable, the addition of exhaust control often improves process robustness, resulting in an increased Cpk. For processes using rapidly responding regulators, such as those offered by Brooks, the tight exhaust control minimizes the amount of airflow out of the tool, resulting in lower air handling costs. With escalating manufacturing costs and increasing emphasis on reducing energy consumption, facilities may want to investigate fab-wide exhaust control as a means to reduce total air handling.

Wet Bench
Wet stations are common equipment in clean rooms, and can account for more than 20% of the air-handling load, thus drastically affecting the cost of running the clean room. The easiest way to maintain a safe environment around an automated wet station is to constantly draw copious amounts of clean room air through the wet bench into the exhaust system. As clean room air cost escalates, however, there is a significant value in improving the cost of ownership of wet benches. Brooks can control your house exhaust, maintain safety, and minimize your costs.

Gas Cabinet Heat Exhaust
When gas bottles are changed or maintained, significant air-flow through the cabinet is required to maintain worker safety. When the cabinet is closed, however, little air-flow is required to scavenge the cabinet. To maintain worker safety with conventional technologies, exhaust is set for the flow required during maintenance and never changed. This results in a significant amount of wasted air, which must be scrubbed before release into the atmosphere.

Brooks' unique technology responds immediately to a door or window opening in the gas bottle cabinet. By using this technology in a pressure mode, a single set point will ensure sufficient flow when personnel are present yet maintain minimal flow when the cabinet is closed. This minimal flow reduces the amount of air sent to the scrubber, significantly reducing scrubbing costs.

Energy Saving Control Platforms

VRV 2000

The VRV-2000 Vacuum Regulation Valve is designed with electronic butterfly valves to maintain a constant pre-set pressure differential between a wet bench and the clean room.