SENTRY 1510 AUTOMATED

The SENTRY 1510 controls pressure in atmospheric diffusion furnaces and other atmospheric process chambers improving process repeatability and reducing contamination. Through its rapid response to fluctuations, the production-proven SENTRY 1510 prevents backstreaming of contamination from house exhaust and provides a stable process environment even with widely fluctuating house exhaust or gas flows. The sealed system contains HCl fumes, improving worker safety.

Features

• Sealed system
• Air-flow regulation with millisecond response time
• Automatic set point control
• Analog or digital host communication
• Production-proven

Benefits

For diffusion/oxidation:

• Enables thinner oxide control
• Controls contamination through protection from backstreaming
• Improves process repeatability
• Saves energy

Applications

• Diffusion
• Oxidation

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