SENTRY 1510AP

The SENTRY 1510 controls oxidation and diffusion process to a selected absolute pressure, protecting from barometric fluctuations and enabling facilities at different altitudes to run the same process. The result is higher quality, more repeatable gate oxides. All other atmospheric processes will also benefit from the higher repeatability and reduced contamination provided by the SENTRY 1510AP. The heart of the SENTRY 1510AP, like all the SENTRY products, is a moving piston, which rapidly responds to changes in the environment. Using only production-proven technology, the SENTRY 1510AP is a robust solution to the effects of barometric pressure on sensitive processes.

Features

• Sealed system
• Air-flow regulation with millisecond response time
• Automatic set point control
• Analog or digital host communication
• Production-proven technology 
  

Benefits

For diffusion/oxidation:

• Controls contamination through prevention of backstreaming
• Improves process repeatability
• Isolates from weather-induced changes
• Enables thinner oxide control
• Enables "copy-exact" processing between facilities at different elevations
• Saves energy

Applications

• Diffusion
• Oxidation

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