|
 |
|
SENTRY 1000 PNEUMATIC
Pneumatic Exhaust Controller
 The SENTRY 1000 Pneumatic Exhaust Controller furnishes the same reliable, millisecond response to exhaust fluctuation as the other members of the SENTRY 1000 line. The addition of dual-stage pneumatic set point control make the SENTRY 1000 Pneumatic ideal for coat and develop processes, when dispense calls for one set point and high speed spin/edge bead removal requires a second set point. Each set point is locked in manually, and the pneumatic actuator switches between the two.
Features
- Simplicity
- Dual Stage Control
- Point-of-use air-flow regulation with millisecond response time
Benefits
- Reliable, fail-safe operation
- Improved Process Control
- Stable exhaust for: Improved coating uniformity
- Reduced defect density
- Enhanced DUV sensitivity
- Better CD control
- Less contamination
- Improved repeatability
- Reduced splashback
- Energy savings
Primary Applications
Previous Page
Back to Wafer Track Exhaust Control Platforms
Next Page
  
|
|