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SENTRY 1000 AUTOMATED
Automated Exhaust Controller
 The SENTRY 1000 Automated Exhaust Controller, with the TIM (Tool Interface Module), offers a full range of programmable set points, making the SENTRY 1000 Automated ideal for any process requiring immediate point-of-use air-flow regulation.
Multiple set point capability allows different flows for different steps in the process or for different processes. Constant, stable exhaust reduces splashback. The SENTRY 1000 also effectively isolates the chamber from the effects of other chambers, so there is no cross-talk. For DUV processing, the SENTRY 1000 prevents the back streaming of contaminants that desensitize DUV resist. Reduced splashback and chamber isolation combine to reduce wafer contamination and reduce resist sensitivity.
The optional Fast Set Point feature enables the exhaust controller to change set point in less than 0.5 seconds. By learning stepper motor positions for recipe set point, the TIM commands the stepper motor to the last good position, for a rapid transition from one set point to another. In case of drift or changing system dynamics, the software is adaptive, recognizing and recording the new position for future use.
Features
- Simplicity
- Integrated software for all major track tools
- Point-of-use air-flow regulation with millisecond response time
- Multiple, automatically controlled set points
- Analog or digital control
- Real-time trend chart of actual pressure/flow
- Real-time, numeric read-out of set point, process pressure/flow, and stepper motor position
- Networkability
- Optional menu-driven programming
- Optional fast set point control
Benefits
- Reliable, fail-safe operation
- Flexibility
- Stable exhaust for: Improved coating uniformity
- Reduced defect density
- Enhanced DUV sensitivity
- Better CD control
- Less contamination
- Improved repeatability
- Reduced splashback
- Smaller edge exclusion
- Outgassing isolation
- Energy savings
- Fastest response to set point change (with Fast Set Point feature)
Adaptive software (with Fast Set Point feature)
Primary Applications
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